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透射电镜专用CCD相机摄像分析系统


 

    TVIPS 透射电镜专用CCD相机分辨率高、图像质量佳,是应用于材料领域、生命科学、半导体材料分析的理想成像系统。其功能强大的应用软件包EM-MENU4.0,不但具有友好的操作界面,丰富的图像处理功能如傅立叶操作和过滤功能,而且可对电镜进行自动聚焦,自动消像散,校正量角器等操作。对实时图像扣除噪音,校正样品倾斜后图像的焦距变化以及图像平移等。可通过自动采集系列倾斜角的图像,再应用电子断层成像软件进行三维重构,从而获得样品的三维结构信息 。

 


一. FastScan系列CCD相机
包括FastScan-F114/-F114T及FastScan-F214/-F214T两类快扫描相机。

主要特点

1. 二合一功能:同时具备高分辨率扫描CCD相机和快扫描CCD相机的视频输出功能。可变的机械结构设计可使它安装在各种厂家(JEOL、FEI、Hitachi…)制造的所有型号的透射电镜上。闪烁体性能优异,应用在100 ~ 400 KV的高压下,有高分辨率优化型(HR)和高敏感度优化型(HS)两种标准类型。闪烁体和CCD传感器的连接方式为光纤耦合,可收集更多的的光子信号。
2. 独特的CCD冷却方式:与透射电镜的真空分离,采用Peltiel效应冷却的CCD芯片位于单独的真空室中;而闪烁体的表面温度接近室温。这种设计避免了污染,同时也可以在不关闭CCD相机时对透射电镜的相机室进行放气,更换底片等操作。
3. 具有防止CCD中邻近电荷交叉干扰的功能,便于采集衍射花样。
4. 功能强大的图像采集、分析软件包EM-MENU 4.0:
· 实时图像处理功能,对实时图像扣除噪音,使其对比度好,视场均匀;此外,同时进行“Power spectrum”图谱计算,实时校正聚焦,像散和放大倍数。
· 图像无缝拼接(蒙太奇),通过软件自动控制束流偏转和图像偏转线圈,分别在X,Y方向连续采集多张图像,然后采用图像强度补偿的方法进行亚像素精度级图像拼接,可以得到与底片尺寸相当的视场范围图像。
· 精确控制TEM电子光学系统,对电镜进行自动聚焦,自动消像散,校正量角器,“Low-dose”等操作。软件自动通过对中,平移,倾斜校正等从而校正样品倾斜后图像的焦距变化以及图像平移。
· 三维重构,通过自动采集系列倾斜角度的图像,然后通过电子断层成像软件,对图像进行对中,组合,从一系列二维图像中重构出三维结构信息。
· 安装位置灵活
FastScan-F114具有灵活可变的安全设计,可以按照不同用户的要求安装在不同的位置。此外用户也可以配置与透射电镜不同位置链接的法兰盘,从而在不同时期将F114安装在不同的位置,下图表示为F114的不同位置的安装型号。

Available in multiple Designs
The FastScan Series represents a new generation of CCD cameras combining a large field of view, the superior quality of a slow scan CCD camera with the fast frame rate of a video camera. Various mechanical designs make it suitable to almost all TEMs. The frame transfer CCD chip allows the FastScan to operate without beam shutter.
 


 

Multiple Designs

FastScan-F114/-F114T (1K*1K)


FastScan-114 represents a new generation of CCD cameras, combining the superior quality of a slow scan CCD camera with the fast frame rate of a video camera.It is available as On-, Near- and Off-Axis Version.

The FastScan-F114 is available in the following designs:
F114:On-axis, available for all TEMs with adaptors in the bottom plate

F114T:On-axis, with 2:1 tapered fiber optics. Increased field of view and resolution. Fiber optical coupling of the electron-sensitive layer (scintillator) with the CCD sensor increases the amount of light collected in comparison with lens-optical coupling and the sensitivity of the camera as a result. The tapered fiber optics enlarges the field of view to 29mm x 29mm and increases the resolution.

F114NX:Near-axis, compatible with post-column filters, PEELS, or other TVIPS on-axis cameras

F114FX:Off-axis, compatible with post-column filters, PEELS, or on-axis cameras (FEI/Philips)
 


Fast Scan F214


FastScan-F214/-F214T(2K*2K)

FastScan-F214 is a 2k x 2k TVIPS bottom mounted, on-axis camera with an active area of 28 mm x 28 mm (FastScan-F214T: 56 x 56 mm). It is the perfect solution for demanding applications in biology and materials science.With its built-in mechanical shutter, the full frame CCD can be operated in a 2k x 1k frame transfer mode to facilitate a frame rate of up to 8 frames/sec. Using the optional 2:1 taper optics, FastScan-214 offers an outstanding active area of 60 mm x 60 mm. A high quality 14 bit analog-to-digital converter makes this camera an excellent solution for all types of applications, requiring high dynamic range.

 


二. TemCam系列CCD相机
包括TemCam-F224HDTemCam-F415MPTemCam-F816三类慢扫描相机。

 
Highest quality cameras for TEM
The TemCam Series is the perfect solution for all kinds of applications in material science and biology.
 


Slow Scan F224HD
 

TemCam-F224HD(2K*2K)

TemCam-F224HD is a 2k x 2k TVIPS camera with an active area of 49 mm x 49 mm. It is the perfect solution for applications in material science and biology, requiring maximum dynamic range and ultimate low dose capabilities.
The active pixel area of a 24 μm pixel is 2.9 x larger than a 14 μm pixel resulting in a higher full well capacity of the CCD chip and hence extending the dynamic range. Also, the resolution of a 24 μm pixel camera is improved in comparison to a 14 μm pixel camera with the same number of pixels.
TVIPS optimizes the scintillator for individual demands. Resolution and sensitivity can be customized for high tensions from 100 to 400 kV. Two standard types are available: optimized for high resolution (HR) or for high sensitivity (HS).


Slow Scan F415MP


TemCam-F415MP(4K*4K)

TemCam-F415 is a 4k x 4k TVIPS camera with an active area of 61 mm x 61 mm, moving into dimensions which have been limited to film so far. It is the perfect solution for all kinds of applications in material science and biology. TemCam-F415MP is available with with multiport readout (4 x 1 MHz). High quality 16 bit analog-to-digital converters guarantee maximum performance.
TVIPS has designed a special flange which combines TemCam-F415MP / F224HD with FastScan-114NX, a high-quality fiber-optically coupled CCD camera operating at video rate. Due to disadvantages of side-mounted cameras, this is an interesting option to monitor the TEM image and its FFT in real-time, for the main purpose of alignment, demonstration or low dose search.
 



Slow Scan
F816


TemCam-F816

World’s Highest Resolution Camera for TEMs (8k,16 μm,14 bit)

TemCam-F816 is the first digital camera with a larger recording area than film. With its impressive area of 128 mm x 128 mm and ultra-high resolution of 8192 x 8192 pixels the F816 surpasses the performance of film. It is the ultimate solution for applications in material science and biology.
The active area of 128 x 128 mm is about 2x larger than the standard film areas of 100 x 80 mm.
Eight readout ports, each sampling with 10 MPixels, digitize the image information and transfer the data into the PC memory within 5 secs. With a subarea of 2k x 2k, a frame rate of 1.5 fps can be achieved.
 


. 与CCD相机配套的TEM图像处理软件
EM-MENU 4.0
Advanced TEM image processing package

包括EM-Menu 4.0 Basic基本版及EM-MENU 4.0 Extend增强版(可选)两个版本。

软件特点
1)
图像采集
·
单次和多次曝光(Single and double exposure)
·
连续读出采用“flatfield”和快速傅立叶变换(FFT)计算的图像
·
自动获取图像系列,包括聚焦系列、时间延迟系列、单倾和双倾系列
· “Spot scan”
功能采集系列图像,在使用蒙太奇功能进行图像拼接。
·
视频记录(FastSan–F114系列)Video recording (only available with FastSan).图像处理
·
线扫描功能
·
图像统计,计算直方图
·
亚像素级系列图像对中校正背底扣除;优化图像显示:调整自动对比度和亮度。
·
用户自定义“TCL高级图像处理

2) TEM控制
·
适于所有电镜的远程控制界面
·
电子辐照强度计算
·
自动聚焦和自动消像散
·
自动在“Low Dose”条件下采集系列倾斜图像
·
全息图像重构:断层成像及三维重构 (单独的软件包)

3) 傅立叶计算
· “Power spectra”
计算
·
标定标尺(Scale bar and circles
· “PCTF”
功能设定
·
计算衍射花样Diffraction tableau (Zemlin)
·
线和面轮廓测量(Measurement of line and sector profiles
·
傅立叶过滤(Fourier filtering
·
布拉格衍射计算(Bragg reflexes
·
织构过滤功能(Texture filter
·
使用晶体样品的“power spectra”功能校正放大倍率

4) 自动透射电子片层成像(Automatic Electron Tomography

5) 文件的输入/输出格式
· 8
位和16位的TIFF
· EM
格式
· MRC
格式
· RAW
数据
·
将系列图像生成AVI电影格式
· Postscript
·
复制和粘贴
TIFFEM格式的文件头中包含有所有相关电镜参数

注: EM-Menu 4.0 Basic基本版包括:图像采集(Image acquisition)、图像处理与分析(Image processing & analysis)以及文件输入/输出(File input/output)等基本功能,其余功能请选用增强版。


四. 常用TVIPS透射电镜专用CCD相机技术参数

1.FastScan-F114技术参数

* 分辨率:1024 x 1024 pixels (1K*1K)
*
芯片类型:帧转移型
*
像素尺寸:14µm
*
视场范:14.3 mm X 14.3 mm 28.6 mm X 28.6 mm(F114T)
*
读出速度:20 Mpixel/sec
*
桢频:25/ 512×512
*
耦合方式:光纤耦合
*
具有单个电子灵敏度
*
抗邻近信号干扰功能
* Peltier
制冷系统
* CCD
真空室与透射电镜真空系统隔离
*
具有视频图像记录器功能

2.FastScan-F214技术参数

* 分辨率:2048 x 2048 pixels(2K*2K)
* 像素尺寸:14µm
* 耦合方式:光纤耦合1:1。可选2.1:1(F214T)
* 视场面积:28.7 mm x 28.7 mm. FastScan F214T57 mm x 57 mm
* 芯片类型:全帧型。帧转移(F214T)
* 动态范围:14
* 读出速率:10.5 MPixel
* 帧频:
- 单张全幅面图像读出时间:450-500 ms,每秒约2
- 单张512 x 512格式图像读出时间: 250-300 ms,每秒约3-4
特殊的快速读出格式
- 1024 x 512 @ 2x binning
- Field of view: half field of the CCD
- Readout time: 110-125 ms,每秒约7-8
* 抗信号干扰(anti-blooming)
* CCD 相机真空室与TEM真空室隔离
* 可在高达400 kV条件下工作
* 透射电镜底部轴心位置(on-axis)安装,可转动
* 单通道读出

3.TemCam-F415技术参数

* 分辨率:4096 x 4096 pixels
* 像素尺寸:15μm x 15μm
* 耦合方式:光纤耦合1:1
* 视场面积:61.2 mm x 61.2 mm
* 芯片类型:全帧型
* 动态范围:16
* 读出速率:1 MPixel4 MPixel(F415MP)
* 抗信号干扰(anti-blooming)
* CCD 相机真空室与TEM真空室隔离
* 可在高达400 kV条件下工作
* 透射电镜底部轴心位置(on-axis)安装,可转动

 

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