Q150T Plus - Turbomolecular pumped coater
Model：Q150T S Plus/Q150T E Plus/Q150T ES Plus
The Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10 minus 5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density. Recommended applications for Q150T Plus: High resolution magnification SEM / Protective platinum layers for FIB / R&D of corrosion, friction, and wear protective layers / Protective layers on medical devices / BSE imaging / EDX, WDS, EBSD analysis / Carbon coating of replicas etc.
The Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.
The Q150T Plus is available in three configurations:
- Q150T S Plus – an automatic sputter coater for non-oxidising metals. Sputtering targets include; Cr, Ir, W, ITO, Al.
- Q150T E Plus – an automatic carbon cord coater for SEM applications such as EDS and WDS. Metal evaporation/aperture cleaning option available.
- Q150T ES Plus – a combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds. Metal evaporation/aperture cleaning option available.
Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use. Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process. System prompts user to confirm target material and it then automatically selects appropriate parameters for that material. Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own. Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.
Automatic, controlled carbon rod evaporation for TEM applications