英国Quorum/Emitech离子溅射镀膜仪、蒸碳镀膜仪、临界点干燥仪等,作为世界顶级电镜制样设备,在电子显微镜(扫描电镜透射电镜)的样品制备领域中应用非常广泛。产品主要分类及型号如下:
Sputter Coating Systems
磁控溅射镀膜仪(又称离子溅射喷金仪)型号:
SC7620,K500X,K550X,K575X
K650X,K675X,SC3000 |
Carbon Coating and Evaporation Systems
镀碳仪和热蒸镀镀膜系统
型号:K400X,K450X,K950X,K975X |
Freeze Driers(Peltier/LN2 Cooled )
冷冻干燥机(Peltier电制冷/液氮制冷)型号:
K750X,K775X |
Cryogenic Systems for EM
低温电镜冷冻制样系统
型号:
K1250X,PP2000,PP2000T |
Critical Point Driers
临界点干燥仪
型号:
K850X,E3000,E3100 |
ESEM / VP Cooling Stage
环扫/可变真空电镜冷台
型号:
K25X |
RF Plasma(Ashing/Etching)
射频等离子刻蚀仪:
K1050X |
Glow Discharge Unit
辉光放电单元
型号:
K100X,K350X |
Quorum/Emitech is a world leader in the development of sample
preparation equipment for use in the Electron Microscopy industry.
We have a wide and varied customer base which includes
hospitals, Universities, and major blue chip companies in the health care and
semiconductor industries
All design, development, assembly and testing/commissoning is
carried out ‘in house’. The Company conforms with the CE requirements and
manufactures to ISO 9000 Quality System.
| The
K500X Sputter Coater with Magnetron Target Assembly
The
K500X System uses a Magnetron Target Assembly which improves the
efficiency, and gives a Fine Grain and Cool Sputtering, using low
voltages.
Note: The K500X is a manual version of the K550X without
rotating stage.
|
The
K550X Automatic Sputter Coater with Rotating Specimen Stage
The
K550X employs a Rotating Specimen Stage which can also be tilted and
accommodates a range of specimens and stubs. With Fully Automatic Control
and pre-selectable parameters, the K550X gives repeatable thin film
thickness depositions.
|
| The
K650X Large Sample Coater with Triple Sputtering Head
The
three magnetron target assemblies in the K650X are positioned to give an
even deposition coating over a large diameter. This method allows standard
targets to be utilised. The triple sputter system is particularly useful
in the Semiconductor Wafer Industry.
|
The
K575X Peltier Cooled High Resolution Sputter Coater
The
K575X uses a 'Turbo' pump, backed by a Rotary Vacuum pump. The vacuum can
be adjusted to suit conditions for Chromium or Gold targets and the
sputter head is Peltier Cooled to give high performance, fine grain
coatings.
|
| The
K675X Sequential High Resolution Large Sample Coater
The
K675X with twin gear rotating sample stage gives a progressive elliptical
rotation for even sputtering desposition. Complete 8 inch (200mm) wafers
can be coated. The multi-target system is particularly useful for the
semi-conductor wafer industry.
|
The
SC3000 Sequential Large Sample, High Resolution Sputter System
The
SC3000 Sputtering Coater System can coat complete 12 inch (300mm) wafers.
Three sequential coatings can be achieved without breaking vacuum,
offering multi-target sputtering. This high vacuum, high resolution
coating system gives fine, and precise reproducible coatings
|
| The
K450X Carbon Coater with Flash Evaporation
The
K450X uses several Carbon Fibre types to cover a range of deposition
thicknesses operating at rotary vacuum pressures. The coater employs low
voltage, high current, electrodes between which the carbon fibre is
located and causes the carbon to burn quickly or 'Flash' the fibre fusing
as part of the process.
|
The
K950X Carbon Evaporator for SEM, TEM & X-Ray Applications
The
K950X High Vacuum Evaporator gives continuous carbon films using carbon
rod evaporation. The carbon rods are shaped to achieve high current
density with sufficient temperature to cause evaporation. It can be used
for support films and replicas in TEM and X-Ray analysis, and thin film
coatings for SEM.
|
| The
K975X High Vacuum Evaporator for Multiple Thin Film Applications
The
K975X Thin Film Evaporator System enables a range of preparation
techniques to be applied with flexibility. It allows for Carbon
Evaporation and Metal Evaporation, together with a Sputter Coating option.
A range of techniques can be practiced including carbon support films and
replicas for TEM, low angle shadowing and sequential layer coatings using
dual source evaporation.
|
The K1250X
Cryogenic Freezing & Preparation System
A
'self contained' preparation system, with a turbo molecular, high vacuum
pumping unit to allow the freezing, preparation, transferring, and
subsequent examination of frozen hydrated specimens in a Scanning Electron
Microscope.
|
|
The K850
Critical Point Dryer for SEM, AFM & TEM Specimen Preparation
The
K850 Critical Point Dryer is ideal for the drying or preparation of
Biological Specimens, avoiding the damaging effects of surface tension.
The K850 ensures that the critical point is accurately obtained.
|
The
K1050X Plasma Treatment Unit with RF Generator
The
K1050X Plasma Treatment Unit consists of a solid state RF generator and
associated tuning circuits, and employs an Oxygen/Argon mix of gases, the
Oxygen removing the hydrocarbons and the Argon giving a surface etching of
the samples.
|
|
The
K750X Freeze Dryer with Peltier Cooling
The
K750 Freeze Dryer, with 'peltier' thermoelectric stage, and drying
temperatures of the order of -60oC, with back-up water cooling
at a nominal 15oC. Disposable desiccant containers located in
the preparation chamber enhance water vapour removal.
|
The
K775X Freeze Dryer with Liquid Nitrogen Fed Cold Stage
The
K775 Turbo Freeze Dryer operates at temperatures down -140oC
and employs a turbomolecular pumping unit, backed by a rotary vacuum pump.
Lower temperatures are achieved by using a liquid nitrogen fed cold stage
|
|
Environmental,
Variable Pressure SEM Cooling Stage
Peltier
Driven Cooling Stage for ESEM, VP, EP and SEM, with secondary cooling via
a liquid cooling circuit and available for any Hitachi, Leo, Joel, FEI SEM
and other SEM vendors.
|
The
K100X Glow Discharge system in the DC+ Mode, can draw up 1.5Kv. allowing
ion etching of the specimen surface to remove oxide or resist layers.
Polarity of can be changed for Carbon Film Surface Treatment or Surface
Etching of Metallic Specimens. |
| Vacuum
Pumps - Turbomolecular, Rotary, Diaphragm and Scroll
Precision
engineered pumps, ideal choice for a wide range of applications and
environments, together with low noise levels. Pumps include 2 Stage
Rotary, 3 Stage Diaphragm and Scroll Pumps.
|
The
K250X Carbon Coater Attachment
The
K250 uses several Carbon Fibre types to cover a range of deposition
thicknesses operating at Rotary Vacuum pressures utilising the chamber of
the Sputter Coater. Coating is omni-directional, and has a relatively
short cycle time of the order of 5 minutes.
|
| The K150X
Thin Film Measurement & Thickness Monitor
The
K150 consists of a Control Unit external to the Instrument and a Crystal
Holder with an Interconnection Lead and Pre-Amplifier. In addition, it has
a vacuum collar to suit the appropriate Instrument Chamber.
|
The
K350 Glow Discharge Attachment for Carbon Films & Etching
The
K350 Glow Discharge system in the DC+ Mode, can draw up 1.5Kv. allowing
ion etching of the specimen surface to remove oxide or resist layers.
Polarity of can be changed for Carbon Film Surface Treatment or Surface
Etching of Metallic Specimens.
|